Photoresist Chemicals Benzoic acid, 3-[3-[5-[(3,4-dichlorophenyl)[[4-[(diethoxyphosphinyl)difluoromethyl]phen yl]methyl]amino]-1,3,4-oxadiazol-2-yl]phenoxy]-, methyl ester Cas:875902-88-8 Molecular Formula:C34H30Cl2F2N3O7P