Photoresist Chemicals Benzoic acid, 3-[(3S,4S)-3-methyl-1-[(1R,3S)-3-(1-methylethyl)-3-[[6-(trifluoromethyl)- 2H-1,3-benzoxazin-3(4H)-yl]carbonyl]cyclopentyl]-4-piperidinyl]-, ethyl ester Cas:881492-72-4 Molecular Formula:C33H41F3N2O4