Photoresist Chemicals Benzoic acid, 4-[[[3-(4-chlorophenyl)-4,5-dihydro-5-[4-(1,1,2,2-tetrafluoroethoxy)phenyl ]-1H-pyrazol-1-yl]carbonyl]amino]-, 1-methylethyl ester Cas:93343-73-8 Molecular Formula:C28H24ClF4N3O4