Photoresist Chemicals Benzoic acid,2-[3-[5-[(diethylamino)sulfonyl]-2-methoxyphenyl]-1-ethyl-2-triazen-1-yl]-5-sulfo-,sodium salt (1:2) Cas：85536-99-8 Molecular Formula：C20H26 N4 O8 S2 . 2 Na