Photoresist Chemicals Bicyclo[2.2.2]octan-2-one, 3,4-dimethyl-7-(1-methylethylidene)-5-[(1R)-1-methyl-3-[(methylsulfonyl) oxy]propyl]-, (1R,3R,4R,5R)- Cas:922173-42-0 Molecular Formula:C18H30O4S