Photoresist Chemicals Bicyclo[3.1.0]hexane-2,6-dicarboxylic acid, 3-azido-2-[[(1,1-dimethylethoxy)carbonyl]amino]-6-fluoro-, diethyl ester, (1R,2R,3R,5R,6R)- Cas:820244-66-4 Molecular Formula:C17H25FN4O6