Photoresist Chemicals Carbamic acid, [(1R,3S)-3-(1-methylethyl)-3-[[4-[6-methyl-4-(trifluoromethyl)-2-pyridinyl]- 1-piperazinyl]carbonyl]cyclopentyl]-, 1,1-dimethylethyl ester Cas:872592-73-9 Molecular Formula:C25H37F3N4O3