Photoresist Chemicals Carbamic acid, [(1S,2S)-2-[4-(1,6-dihydro-6-oxo-3-pyridinyl)phenyl]-1-[[(3S)-3-fluoro-1- pyrrolidinyl]carbonyl]propyl]-, 1,1-dimethylethyl ester Cas:690257-88-6 Molecular Formula:C24H30FN3O4