Photoresist Chemicals Carbamic acid, [2-[[(1R,2R)-2-[[(5-chloro-1H-indol-2-yl)carbonyl]amino]-2,3-dihydro-1H -inden-1-yl]amino]-2-oxoethyl]-, 1,1-dimethylethyl ester Cas:597554-89-7 Molecular Formula:C25H27ClN4O4