Photoresist Chemicals Carbamic acid, [3-cyano-1-[2,6-dichloro-4-(trifluoromethyl)phenyl]-4-[(trifluoromethyl)sulf onyl]-1H-pyrazol-5-yl]methyl-, 2-ethoxy-1-(ethoxymethyl)ethyl ester Cas:872532-69-9 Molecular Formula:C21H20Cl2F6N4O6S