Photoresist Chemicals Carbamic acid, [5-[2-(2-fluoro-3-iodophenyl)-2,3-dihydro-1-hydroxy-3-oxo-1H-isoindol-1 -yl]-1H-benzimidazol-2-yl]-, methyl ester Cas：870603-93-3 Molecular Formula：C23H16FIN4O4