Photoresist Chemicals Carbamic acid, [5-[2,3-dihydro-1-hydroxy-2-(3-methylphenyl)-3-oxo-1H-isoindol-1-yl]-1H -benzimidazol-2-yl]-, methyl ester, monohydrochloride Cas:870604-84-5 Molecular Formula:C24H20N4O4.ClH