Photoresist Chemicals Carbamic acid, [5-[2,3-dihydro-1-hydroxy-3-oxo-2-[3-(1,1,2,2-tetrafluoroethoxy)phenyl]-1 H-isoindol-1-yl]-1H-benzimidazol-2-yl]-, methyl ester, mono(trifluoroacetate) (salt) Cas:870605-00-8 Molecular Formula:C25H18F4N4O5.C2HF3O2