Photoresist Chemicals Carbamic acid, [[(5S)-3-[4-(5,6-dihydro-5-oxo-4H-1,3,4-thiadiazin-2-yl)-3-fluorophenyl]- 2-oxo-5-oxazolidinyl]methyl]-, 1,1-dimethylethyl ester Cas:581064-40-6 Molecular Formula:C18H21FN4O5S