Photoresist Chemicals Carbamic acid, dimethyl-, (3R,5S)-5-[[4-[[3-chloro-4-(4-thiazolylmethoxy)phenyl]amino]thieno[2,3- d]pyrimidin-6-yl]ethynyl]-3-pyrrolidinyl ester Cas:833477-51-3 Molecular Formula:C25H23ClN6O3S2