Photoresist Chemicals Carbamothioic acid, [[(5S)-2-oxo-3-[6-[4-(2-pyrrolidinylcarbonyl)-1-piperazinyl]-3-pyridinyl]-5- oxazolidinyl]methyl]-, O-methyl ester Cas：824415-56-7 Molecular Formula：C20H28N6O4S