Photoresist Chemicals Carbamothioic acid, [[(5S)-3-[6-[4-(cyclopropylthioxomethyl)-1-piperazinyl]-3-pyridinyl]-2-oxo- 5-oxazolidinyl]methyl]-, O-methyl ester Cas:824415-62-5 Molecular Formula:C19H25N5O3S2