Photoresist Chemicals Carbonic acid, (2E,4S,5R,7S,8S,9E)-4-[[(1,1-dimethylethyl)dimethylsilyl]oxy]-8-hydroxy -3,5,7,9-tetramethyl-6-oxo-2,9-undecadiene-1,11-diyl diethyl ester Cas:880462-55-5 Molecular Formula:C27H48O9Si