Photoresist Chemicals Cyclohexanecarboxamide, N-[4-[(2R,6S)-2,6-dimethyl-4-morpholinyl]phenyl]-4-[[(2,2,2-trifluoroethyl )sulfonyl]amino]-, trans-rel- Cas：872841-96-8 Molecular Formula：C21H30F3N3O4S