Photoresist Chemicals Cyclopenta[c]pentalene-2-carboxylic acid,1,3a,4,5,5a,6,7,8-octahydro-1,3a,6- trimethyl-8-oxo-,(1R,3aS,5aS,6R,8aS)- Cas:97718-45-1 Molecular Formula:C15H20O3