Photoresist Chemicals Cyclopentanecarboxylic acid, [[[[[(5S)-3-[3-fluoro-4-(tetrahydro-1,1-dioxido-2H-thiopyran-4-yl)phenyl]- 2-oxo-5-oxazolidinyl]methyl]amino]carbonyl]oxy]methyl ester Cas:848864-91-5 Molecular Formula:C23H29FN2O8S