Photoresist Chemicals Ethanimidothioic acid, N,N-((1-((phenylmethoxy)methyl)-1,2-ethanediyl)bis(oxysulfinyl(methylimino)carbonyloxy))bis(2-(dimethylamino)-2-oxo-, dimethyl ester Cas:81862-15-9 Molecular Formula:C24H36N6O11S4