Photoresist Chemicals Glycine, N-[[1,6-dihydro-6-oxo-2-[[(phenylmethoxy)carbonyl]amino]-9H-purin-9-yl ]acetyl]-N-[(1S,2S)-2-[[(1,1-dimethylethoxy)carbonyl]amino]cyclopentyl]- Cas:870272-78-9 Molecular Formula:C27H33N7O8