Photoresist Chemicals Glycine, N-[[4-cyano-7-[(3S)-3-(dimethylamino)-1-pyrrolidinyl]-5-methyl-6-phenyl- 2-benzoxazolyl]carbonyl]-N-methyl-, 1,1-dimethylethyl ester Cas:927391-48-8 Molecular Formula:C29H35N5O4