Photoresist Chemicals Glycine, N-[(diethylamino)sulfonyl]-N-[[3-[2-[5-methyl-2-[4-(trifluoromethyl)phenyl] -4-oxazolyl]ethoxy]phenyl]methyl]-, ethyl ester Cas：873534-74-8 Molecular Formula：C28H34F3N3O6S