Photoresist Chemicals Hydrazinecarboxylic acid, 2-[2-amino-4-(methylthio)-1-oxobutyl]-, 2,2,2-trichloroethyl ester, (S)-, mono(trifluoroacetate) Cas:94770-63-5 Molecular Formula:C8H14Cl3N3O3S.C2HF3O2