Photoresist Chemicals Isoxazole, 3-[2-[[(1,1-dimethylethyl)dimethylsilyl]oxy]ethyl]-2,5-dihydro-4-iodo-5-(1- methylethyl)-2-[(4-methylphenyl)sulfonyl]- Cas：925428-34-8 Molecular Formula：C21H34INO4SSi