Photoresist Chemicals Isoxazole, 3-[[difluoro[1-methyl-5-(3-oxetanyloxy)-3-(trifluoromethyl)-1H-pyrazol-4-yl ]methyl]sulfonyl]-4,5-dihydro-5,5-dimethyl- Cas：878203-98-6 Molecular Formula：C14H16F5N3O5S