Photoresist Chemicals Octasilane, 4,5-bis[1,1,2,3,3,3-hexamethyl-2-(trimethylsilyl)trisilanyl]-1,1,1,2,3,3,4,5, 6,6,7,8,8,8-tetradecamethyl-2,7-bis(trimethylsilyl)- Cas:881693-17-0 Molecular Formula:C38H114Si18