Photoresist Chemicals Phosphonic acid, [[2-amino-3-cyano-1,4,5,6,7,8-hexahydro-1-(4-methylphenyl)-4-(trifluoro methyl)-4-quinolinyl]difluoromethyl]-, diethyl ester Cas:848504-24-5 Molecular Formula:C23H27F5N3O3P