Photoresist Chemicals Phosphonic acid, P-[4-[[[7-[(4-fluorophenyl)methyl]-1,2-dihydro-4-hydroxy-1-methyl-2-oxo- 1,5-naphthyridin-3-yl]carbonyl]amino]butyl]-, diethyl ester Cas:925912-76-1 Molecular Formula:C25H31FN3O6P