Photoresist Chemicals Propanedioic acid, [[[[3-[(dimethylamino)carbonyl]-2,6-difluoro-4-[[[4′-(trifluoromethyl)[1,1′-bi phenyl]-2-yl]carbonyl]amino]phenoxy]carbonyl]oxy]methyl]-2-thiazolyl-, diethyl ester Cas:847861-24-9 Molecular Formula:C35H30F5N3O9S