Photoresist Chemicals Propanedioic acid, [[[[3-[(dimethylamino)carbonyl]-4-[[[4′-(trifluoromethyl)[1,1′-biphenyl]-2-yl] carbonyl]amino]phenyl]acetyl]oxy]methyl]-2-thienyl-, diethyl ester Cas:594843-11-5 Molecular Formula:C37H35F3N2O8S