Photoresist Chemicals Propanoic acid, 3-[1-[4-[(5S)-5-[(acetylamino)methyl]-2-oxo-3-oxazolidinyl]-2-fluorophen yl]-4-piperidinylidene]-3-cyano-, ethyl ester Cas：685570-68-7 Molecular Formula：C23H27FN4O5