Photoresist Chemicals Thiazolo[5,4-b]pyridine-2-carboxamide, 6-[(3,4-difluorophenyl)methyl]-4,5-dihydro-4-methyl-5-oxo-N-(4-pyridinyl methyl)- Cas:660815-78-1 Molecular Formula:C21H16F2N4O2S