Photoresist Chemicals Thieno[3,2-b]pyridin-5(4H)-one, 4-[(2-chloro-5-thiazolyl)methyl]-6-(1,1-dioxido-2H-1,2,4-benzothiadiazin -3-yl)-7-hydroxy- Cas：686267-13-0 Molecular Formula：C18H11ClN4O4S3