Photoresist Chemicals TIANFUCHEM-(NE)-2,2,2-trichloro-N-(1$l^65027-52-3,2,4$l^65027-52-3-trithia-3,5-diazacyclopenta-3,4-dien-1-ylidene)acetamide Cas：65027-52-3 Molecular Formula：C2Cl3N3OS3