Photoresist Chemicals Urea, N-[4-[1-[(2,6-difluorophenyl)methyl]-1,2,3,4-tetrahydro-5-[[(2-methoxyeth yl)methylamino]methyl]-2,4-dioxo-3-(2-oxopropyl)thieno[2,3-d]pyrimidin- 6-yl]phenyl]-N’-methoxy- Cas:737789-66-1 Molecular Formula:C29H31F2N5O6S